ProjectsNanotechnology and Materials

Research Overview

We are developing vibration generators that convert environmental vibration into electricity using microsystems (MEMS) technology, vibration sensors that can detect abnormalities in tunnels, bridges, and other structures based on vibration, and scanning mirrors for distance sensors (lidar) and augmented reality (AR) displays using laser scanning for automatic driving and driver assistance. We are also developing scanning mirrors for distance sensors (lidar) and augmented reality (AR) displays. A vibration generator supplies power to the sensors and sends signals to a wireless network that watches over the system without batteries or external power. Rotating springs of the mirrors will be coated with an atomic layer deposition (ALD) film to extend their fracture life and improve safety.

Research Features

• We have achieved the world's top-class micro vibration generator using lead-free piezoelectric thin film (MgHfAlN), which converts vibration into electric power with high efficiency.
• The piezoelectric generator supplies electric power to sensors and sends signals wirelessly to a system that forms a wireless sensor network.
• The piezoelectric thin film can operate as a high-sensitivity vibration sensor and can also be applied to a wide range of fields by designing it to match the vibration band to be measured.
• An omni-directional scanning mirror has been designed as a system for lidar, and the motion stability of omni-directional scanning has been assessed.
• The scanning mirror for AR displays consists of a high-aspect ALD alumina fin structure that suppresses dynamic deformation, and is lightweight, large aperture, and capable of fast response.
• The ALD coating extends the MEMS fracture life by more than one order of magnitude.

Expected Outcomes and Developments

The sensor network module, which combines a vibration generator, vibration sensor, and wireless chip, requires no batteries and wirelessly transmits the presence or absence of abnormalities, contributing to the construction of infrastructure systems that support a safe and secure society. The sensor network module can detect age-related deterioration of structures such as bridges, tunnels, roads, and buildings in real time, helping to estimate their service life and ensure their safety, thereby contributing to the creation of a safe and secure society. In addition, laser scanning micromirrors are key devices in laser sensing and laser display technologies, which can contribute to the advancement of automated driving and AR by combining them with artificial intelligence (AI) technology, which has been rapidly developed in recent years. In advanced laser scanning systems, compactness, lightweight design, high-speed communication, and high resolution are features in sensors that are constantly being pursued. We contribute to industrial development through the design and prototyping of long-life scanning mirrors that meet the specifications of industry.